纳秒激光微加工系统的实现  

Design and Implement of Nanosecond Laser Micromachining System

作　　者：刘春阳[1] 傅星[1] 邬泳[1] 

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室,天津300072

出　　处：《应用激光》2008年第3期211-214,共4页Applied Laser

摘　　要：介绍了自行设计的纳秒激光微加工系统的组成和结构,各个部分的功能作用和工作原理,以及基于DSP和FPGA的硬件电路设计。分析了脉冲重复率、激光能量以及二维运动平台速度等参数对加工效果的影响,优化改善了脉冲式激光与二维平台运动的配合。整个系统结构简单,控制方便,稳定可靠,实现了高效率高精度的微加工。The design of nanosecond laser micromachining system is presented, including the role, the function and the principle of every part, the hardware design of the system based on DSP and FPGA is also introduced. The experiments focused on the repetition rate, the energy of the laser and the speed of the two dimensional mechanical platform are analyzed. By resolving the problem on the cooperation of the control of the laser and the platform movement, good performance can be achieved with high accuracy. Above all, the system is simple, convenient control, stability and reliability in micromachining.

关 键 词：纳秒激光 微加工系统 脉冲重复率 DSP FPGA 

分 类 号：TN241[电子电信—物理电子学] TG665[金属学及工艺—金属切削加工及机床]