球冠形栅网曲率半径测量的实验研究  

Experiment Study on the Measurement of Curvature Radius of the Spherical Grid

作　　者：李庆祥[1] 王云庆[1] 薛实福[1] 徐毓娴[1] 

机构地区：[1]清华大学精密仪器与机械学系

出　　处：《仪器仪表学报》1997年第5期468-474,共7页Chinese Journal of Scientific Instrument

摘　　要：本文采用精密机械——显微镜——ＣＣＤ摄像机——图像处理——光栅测量——计算机控制的测量方案。采用图象处理的方法实现了光学非接触对准，通过对栅网上数点进行最小二乘拟合，准确地得到了球冠形栅网的曲率半径。本文介绍了该测量原理并对该测量方案进行了实验，实验结果表明。To guarantee the manufacture accuracy of a spherical grid, it is deman ded to accurately measure the curvature radius, which is one of the important parameters of spherical grid. In this paper, the measuring scheme consisting of precision, machine, microscope, CCD camera, image processing, gritting measurement,and computer control is adop ted .By using the method of image processing, noncontact alignment with high speed and accuracy is achieved.The curvature radius of grid is obtained precisely by applying least square fitting to multiple points on the grid. This paper introduces the measurement principle,and experiments are done on the system. The experiment result shows that repeatability accuracy is up to±5μm.

关 键 词：球冠形栅网 图象处理 行波管 曲率半径 测量 

分 类 号：TN124.07[电子电信—物理电子学]