SiNx钝化256元InGaAs短波红外焦平面探测器  

256 elements linear InGaAs SWIR focal plane array with SiN_x passivation

作　　者：唐恒敬[1] 张可锋[1] 吴小利[1] 王妮丽[1] 陈新禹[1] 李雪[1] 龚海梅[1] 

机构地区：[1]中国科学院上海技术物理研究所传感技术国家重点实验室

出　　处：《红外与激光工程》2008年第3期424-427,共4页Infrared and Laser Engineering

基　　金：国家自然科学基金重点资助项目(50632060);中国科学院知识创新工程青年人才领域前沿项目资助

摘　　要：为了改善器件的响应均匀性,通过优化台面制作与SiNx钝化工艺制备了高均匀性256元线列正照射InGaAs探测器,实现了该探测器与读出电路的互连,测试了器件的I-V特性、光谱响应、信号和噪声,并利用激光感生电流技术研究了探测器的串音和光敏感区的扩大问题。测试结果表明:在-0.5V偏压下,探测器的暗电流典型值约为0.9nA,平均峰值探测率为7.8×1011cm·Hz1/2·W-1,响应的不均匀性为4.8%。LBIC测试结果表明:光敏元区没有扩大,光敏元之间串音较小,并成功实现了室温扫描成像,图像比较清晰。In order to improve the response uniformity of the device, a high uniformity 256 element front-illuminated InGaAs detector was fabricated with optimizing the mesa and SiNx passivation process. The 256 element front-illuminated InGaAs detector interconnected the readout circuit. The I-V curves, response spectrum, signal and noise of the detector were measured. The crosstalk and extended photoactive area of the InGaAs detectors were studied by laser beam induced current （LBIC） technique. The results show that the typical value of dark current of the InGaAs detector is about 0.9 nA at -0.5 V, the average peak detectivity is 7.8×10^11 cm .Hz^1/2 .W^-1 ,and the non-uniformity of response is 4.8%.The result of LBIC shows that the photoactive area doesn＇t extend, the crosstalk between photoactive areas is negligible, and good thermal image is achieved successfully by scanning technology at room temperature.

关 键 词：INGAAS 焦平面 探测器 LBIC 非均匀性 串音 光敏区 

分 类 号：TN21[电子电信—物理电子学]