MEMS集成滤波器技术  

MEMS integrated filter technology

作　　者：张永华[1] 欧阳炜霞[1] 刘蕾[1] 郭兴龙[1] 赖宗声[1] 王硕[2] 

机构地区：[1]华东师范大学微电子电路与系统研究所,上海200241 [2]同济大学软件学院,上海200092

出　　处：《传感器与微系统》2008年第7期5-8,共4页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(60676047);上海市应用材料研究发展基金资助项目(06SA11)

摘　　要：滤波器是频率转换系统(如,调谐电路、接收器)的基本构成模块。借助于MEMS技术实现的滤波器不仅带来插入损耗、功耗、线性等性能的改善,也有利于将整个通信前端集成到单一芯片上。综述了MEMS可调滤波器的研究进展。与单一利用MEMS电容的调变实现频率可调的滤波器相比,分形可调MEMS滤波技术有更小的插入损耗和更宽的调频范围。Filters are the basic building blocks in frequency converting systems, such as tuners and receivers. Filters based on MEMS technology not only offer clear performances ,such as low insertion loss and power loss ,but also are useful for integrating the whole radio frequency front ends and transceivers on a chip. The recent development for MEMS tunable filters is summarized. Compared with the tunable MEMS filters only realized by tunable capacitor,the fractal tunable MEMS filters have lower loss and wider tuning range.

关 键 词：微电子机械系统 开关 变容器 可调滤波器 可重构滤波器 

分 类 号：TN713[电子电信—电路与系统]