用于MEMS惯性开关的微弹簧有限元动力学分析  

FINITE ELEMENT DYNAMICS ANALYSIS OF MICRO-SPRING IN MEMS INERTIA SWITCH

作　　者：杨卓青[1] 丁桂甫[1] 蔡豪刚[1] 付世[1] 赵小林[1] 

机构地区：[1]上海交通大学微纳科学技术研究院,微米/纳米加工技术国家重点实验室,薄膜与微细技术教育部重点实验室,上海200030

出　　处：《机械强度》2008年第4期586-589,共4页Journal of Mechanical Strength

基　　金：国家863资助项目(2006AA04Z308,2006AA04Z326)~~

摘　　要：设计水平和垂直方向两种驱动形式MEMS(micro-electro-mechanical system)惯性开关,应用ANSYS10.0有限元软件对其中的镍质微弹簧结构进行实体建模和动力学模拟分析,得到其在动载荷下的应力分布情况和端部位移响应曲线,并比较静动载荷下结构参数对微弹簧水平和垂直方向上弹性常数(klevel和kvertic)的影响规律。文中的有限元动力学分析方法为较准确地评定类似MEMS微弹簧弹性常数提供一条有效途径,具有工程实际应用价值,特别是为动载荷下工作的惯性类微器件中弹簧的进一步优化与加工提供重要依据。Vertically and laterally driven MEMS inertia switches are designed. The solid modeling and finite element dynamics analysis of the Nickel micro-spring in the switch are conducted. The stress distribution and the displacement-time response curve of the micro-spring under dynamic load are obtained. The influence of configuration parameters on the spring constants （ including klevel and kvertic ） are compared under static and dynamic loads. The finite element dynamics analysis is considered to be a useful method in evaluating the spring constant in MEMS devices, especially for the spring in inertia micro devices working under the dynamic load.

关 键 词：微机电系统(micro-electro-mechanical system MEMS) 惯性开关 有限元 动力学 弹性系数 

分 类 号：TB115[理学—数学] TB125[理学—应用数学]