传统卤化银感光材料的生产工艺与集成电路制造工艺比较研究  

A Comparative Study on the Production Technologies of Traditional Silver Halides Photomaterials and Integrated Circuits

作　　者：马望京[1] 赵艳艳[1] 段培成 李智[1] 

机构地区：[1]中国科学院理化技术研究所,北京100080

出　　处：《影像技术》2008年第4期14-16,共3页Image Technology

摘　　要：本文通过对传统卤化银感光材料的生产工艺中显影加工工序和集成电路制造工艺中光刻工序的比较研究,表明二者在工艺上具有某些相似点,相互之间可以借鉴。This paper shows that many similar points the production of traditional silver halide photographic were found between development process in materials and lithographic process, in the production of Integrated Circuits,so some problems in each other can be solved in similar ways.

关 键 词：光刻 卤化银 集成电路 

分 类 号：TQ574[化学工程—精细化工] TQ577.35