射频感应耦合Ar-N2等离子体物理特性的Langmuir探针测量及理论研究  

Langmuir probe measurement and theoretical studies on inductively coupled plasma in Ar-N_2 discharge

作　　者：高飞[1] 毛明[1] 丁振峰[1] 王友年[1] 

机构地区：[1]大连理工大学物理与光电工程学院,三束材料改性国家重点实验室,大连116024

出　　处：《物理学报》2008年第8期5123-5129,共7页Acta Physica Sinica

基　　金：国家自然科学基金(批准号:10635010)资助的课题~~

摘　　要：分别通过Langmuir探针测量和动力学模型模拟方法研究了射频感应耦合Ar-N2等离子体中电子能量分布、电子温度、电子密度等物理量随N2含量的变化规律.实验研究结果表明:电子能量分布呈现出非Maxwell型分布,并由双温分布向三温分布过渡;电子温度在不同的气压下随N2含量的增加呈现出不同的变化规律.在放电气压小于1.3Pa时,电子温度随N2含量的增加而下降;当气压大于1.3Pa时,电子温度随N2含量的增加先迅速上升而后缓慢下降.在不同的放电气压下,电子密度随N2含量的增加迅速下降.数值模拟结果与Langmuir探针测量结果趋势一致.In this article we use the Langmuir probe and kinetic model to study the electron energy distribution function（EEDF）,the electron temperature,and the electronic density in the radio-frequency inductively coupled plasma of Ar-N2 discharge.It has been found that,with the increase of the N2 flow,the EEDF varies from the bi-temperature distribution to the tri-temperature distribution;the electron temperature drops monotonically at low pressures（p〈1.3 Pa）,while it first increases and then drops at high pressures（p〉1.3 Pa）.In addition,due to the recombination of electrons and nitrogen molecular ions,the electron density drops substantially at high pressures when a small amount of N2 is added to the gas mixture.Although the theoretically obtained electron temperature is high than the experimentally measured one,the theoretical model presents good predictions of the influences of N2 ratio in Ar-N2 mixture on the electron temperature and EEDF.

关 键 词：感应耦合等离子体 Ar-N2混合气体放电 电子能量分布 LANGMUIR探针 

分 类 号：O536[理学—等离子体物理]