内表面等离子体增强化学气相沉积TiN涂层研究  

PECVD system for treating the inner surface of tube sample

作　　者：金凡亚[1] 王珂[1] 赵嘉学[1] 沈丽如[1] 陈庆川[1] 童洪辉[1] 

机构地区：[1]核工业西南物理研究院,四川成都610041

出　　处：《金属热处理》2008年第8期93-95,共3页Heat Treatment of Metals

摘　　要：介绍了一种新型等离子体增强化学气相沉积内表面复合处理系统。利用此系统沉积TiN涂层的结果表明,100mm×1000mm316不锈钢管内表面沉积涂层相对均匀,且具有较好的表面特性和机械特性。A new kind of plasma enhanced chemical vacuum deposition （PECVD） system which used to strengthen com- poundly the inner surface of the tube sample was presented. Concretely, TiN coating was prepared on the inner surface of the tube sample（φ100mm× 1000 mm） using the system, and all the results indicate that the coating provides relative uniform thickness and good surface and mechanical properties.

关 键 词：等离子体增强化学气相沉积 管状样品 内表面 

分 类 号：TB43[一般工业技术] TB34