基于微悬臂梁的化学传感器的灵敏度研究  

Study on Sensitivities of Microcantilever Chemical Sensors

作　　者：王大甲[1] 胡放荣[1] 姚军[1] 邱传凯[1] 王爱娜[1] 

机构地区：[1]中国科学院光电技术研究所微细加工光学技术国家重点实验室,成都610209

出　　处：《传感技术学报》2008年第8期1333-1336,共4页Chinese Journal of Sensors and Actuators

基　　金：中科院光电技术研究所“百人计划”科研基金资助

摘　　要：基于探测的原理,在动态模式下,首先对不同结构梁的本征频率偏移量进行了有限元分析,结果表明三角形梁的灵敏度最高。然后重点针对不同结构参数的三角形梁进行了动态计算,获得了其频率偏移量随结构参数变化的关系曲线。另外,通过静态模式下的有限元计算,发现各种梁自由端的偏移量相同,表明它们的静态灵敏度与形状无关。最后,对三角形梁在不同测量模式下结构参数的优化设计进行了分析。To analyze the resonance frequency shifts of various constructed beams in the dynamic mode, the finite element analysis has been performed by using the software IntelliSuite. It shows that the most sensitive structure is the triangular shaped cantilever beam. Thus, a detailed dynamic analysis on the triangular beam is presented, and the relationship between the frequency shift and structural parameters is given. The deflection of each type of cantilever beams in the static mode keeps constant, which demonstrates that their static sensitivity is independent of the structure shapes. Some suggestions on optimizing the design parameters for micro triangles are presented.

关 键 词：化学传感器灵敏度 三角形微悬臂梁 动态模式 静态模式 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置]