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作 者:林凯生[1] 李洪武[1] 林松盛[1] 侯惠君[1] 朱霞高[1] 代明江[1]
出 处:《模具制造》2008年第9期76-82,共7页Die & Mould Manufacture
摘 要:材料的磨损、腐蚀及其它环境损伤是机械工业面临的基本问题之一,近年来,由离子参与和等离子体增强的各种气相沉积技术的应用为解决这一问题提供了有效的途径,许多技术已实现工业化生产。本文综述了各种硬质薄膜的发展状况、性能及应用情况,并总结了广州有色金属研究院在这方面的研究开发工作。The material attrition, the corrosion and other environment damage were one of basic problems the mechanical industry faced. In recent years, each kind of gas phase deposition technology which strengthened by the ion participation and the plasma to solve this problem to provide the effective way, many technologies had realized the industrialization production. This article summarized each kind of flinty thin film development condition, the performance and the application situation, and summarized Guangzhou Non-ferrous metal Research institute in this aspect research development work.
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