聚焦离子束的图形产生和自动套准系统  

GRAPHICS GENERATION & AUTO-ALIGNMENT SYSTEM FOR FOCUSED ION BEAM

作　　者：张恝恕 杜秉初[1] 汪健如[1] 

机构地区：[1]清华大学电子工程系,北京100084

出　　处：《微细加工技术》1997年第3期40-45,共6页Microfabrication Technology

摘　　要：本文详细介绍了新一代用于聚焦离子束的图形产生和自动套准系统。该系统设计的基点是充分考虑计算机运算速度极大的提高，使得原来必须靠硬件实现的功能，完全可以由软件来实现，而并不降低其执行速度。带来的好处是大大降低了硬件的规模，提高了系统的可靠性、灵活性和可扩展性。由于硬件的规模的降低，成本也相应降低，这就有利于系统的推广应用。A new graphics generation and auto-alignment system for focused ion beam was introduced The basic point of this system design is that we fully consider the greatly improved speed of the computer. So the functions previously realized by hardwar now can be done by software without lowering the operation speed The advantage is that the. hardware scale is greatly decreased, and the realiability,flexibility, expansibility of the system is increased. The cost is decreased also because of the decreasing of hardware scale. It'll help the wide use of this system.

关 键 词：聚焦离子束 自动套准系统 微电子器件 光刻 

分 类 号：TN305.7[电子电信—物理电子学]