十字片簧弹性支承测量机构的特性分析与设计  

Characteristic analysis and design of measuring mechanism with elastic support of cross-leaf spring

作　　者：王云庆[1] 李庆祥[1] 薛实福[1] 周兆英[1] 

机构地区：[1]清华大学精密仪器与机械学系

出　　处：《机械设计》1997年第11期11-13,共3页Journal of Machine Design

摘　　要：在触针式轮廓测量仪中，性能优良的测量机构是保证触针与被测表面之间“接触测量”的关键部件。本文采用十字片簧弹性支承作为触针的运动支承，并在其特性分析的基础上，进行了参数设计。实验测得：测量力变化率为３５．６Ｎ／ｍ，固有频率达到１９．２Ｈｚ。最后，通过仿真实验得到测量机构运动中回转中心偏移情况。In the stylus profilometer,a measuring mechanism with good performance is the key component,which guarantees“contact measuring”between the stylus and the surface of specimen.This paper adopts cross-leaf spring elastic bearing as the stylus moving bearing.On the basis of its characteristic analysis,the parameter design is carried out.Measurement of the experiment obtains that the variation rate of stylus force is 35.6N/m and the natural frequency reaches 19.2Hz.Finally,by mean of imitation test the shifting status of rotation center in the movement of measuring mechanism is obtained.

关 键 词：轮廓测量仪 片簧支承测量机 特性分析 

分 类 号：TG83[金属学及工艺—公差测量技术]