微机械气流式全方位姿态传感器的建模及计算  

Modeling and simulation of micromachined airflow omnibearing posture sensor

作　　者：宋佳[1] 朴林华[1] 刘玉洁[1] 李言杰[1] 

机构地区：[1]北京信息科技大学传感器实验中心,北京100101

出　　处：《北京机械工业学院学报》2008年第3期21-24,共4页Journal of Beijing Institute of Machinery

基　　金：国家自然科学基金项目(60772012);北京市教育委员会科技计划面上项目(KM00710772009);北京市优秀人才培养;北京市传感器重点实验室和北京市属市管高校人才强教计划项目资助

摘　　要：为了提高传感器的性能,利用ANSYS软件给出了微机械气流式全方位水平姿态传感器的三维有限元建模方法并进行了计算。结果表明:①利用敏感元件结构的对称性,采用先建立一个半模型的方法,可以在建模和观察计算结果时带来方便;②在流体梯度大的地方,网格划分得较密一些,这样有助于节约计算时间和提高计算精度。与以往的二维建模相比较,三维建模得到的计算结果更加全面和准确,为今后传感器性能的研究提供了可靠的依据。In order to improve the performance of sensor, using ANSYS software, the three-dimensional finite element modeling method and simulation results of micromachined airflow omnibearing level posture sensor are presented. The results show that ： （1）Using the sense organ＇ s symmetry characteristic, a half model is built first, which is convenient for modeling and observing the simulation results;（2） Gridding should be meshed more densely where fluid grads are large, which is helpful of saving simulation time and improving precision. Compared with two-dimensional modeling, the simulation results of threedimensional modeling are more comprehensive and exact, which provides dependable basis for further research of the sensor.

关 键 词：三维建模 有限元分析 微机械 全方位 

分 类 号：TN379[电子电信—物理电子学] TN37