基于SABER平台的MEMS系统级模型研究  

System-level modeling research of MEMS based on SABER platform

作　　者：白建社[1] 王航宇[1] 

机构地区：[1]西安航空职业技术学院电子工程系,陕西西安710089

出　　处：《计算机工程与设计》2008年第19期5132-5134,共3页Computer Engineering and Design

基　　金：武器装备预研基金项目(9140C360502060C36)

摘　　要：多端口组件网络方法是一种新的系统级统一建模方法,通过该方法形成的多端口三维组建库可以实现MEMS器件的快速设计与仿真。利用该方法,在SABER仿真平台上搭建了MEMS固态引信核心子系统的系统级行为模型,并进行了一系列的仿真分析,包括小信号频域仿真、时域仿真、以及灵敏度仿真,其结果接近于有限元分析结果。采用多端口组件网络方法进行MEMS器件的设计可以满足设计要求,保证精度,提高设计效率。The multi-port-element network method is a new unitive modeling of system-level. The fast design and simulation ofMEMS devices can be achieved by 3D multi-port-elements library. Based on this method, a system-level behavioral model of MEMS solid state fuze kernel subsystem is built on SABER platform, and simulations such as small single frequency domain simulation, time domain simulation and sensitivity simulation are analyzed. The results are agreed well with that by ANSYS. The studies show that MuPEN method can be applied for the design of MEMS devices to satisfy the requirement, guarantee the precision and improve the efficiency greatly.

关 键 词：微机电系统 SABER平台 多端口组件网络 系统级仿真 

分 类 号：TP216[自动化与计算机技术—检测技术与自动化装置]