一种新型分离式微变形镜的特性分析  

Characteristics Analysis of A Novel Segmented Micro Mirror

作　　者：刘喜斌[1] 余洪斌[2] 李俊[2] 陈海清[2] 

机构地区：[1]湖南理工学院物理与电子信息系,湖南岳阳414006 [2]华中科技大学光电子工程系,武汉430074

出　　处：《湖南理工学院学报（自然科学版）》2008年第3期48-51,55,共5页Journal of Hunan Institute of Science and Technology(Natural Sciences)

基　　金：湖南省教育厅科研资助项目(05C602)

摘　　要：针对一种结构新颖的分离式微变形镜的动、静态特性进行了分析.从能量角度入手对微镜支撑结构在其不同运动状态下所表现出的等效弹性系数进行了推导.以Z轴方向的平动为例对微镜的静态变形-电压关系、谐振频率及瞬态响应进行了详细讨论.分析结果表明,在115V时镜面变形可达2μm,而谐振频率为58.805kHz.同时通过与ANSYS模拟结果的对比证实了理论分析的可靠性.The static and dynamic characteristics of a designed novel segmented micromirror are discussed. At first, the equivalent elastic coefficients of supporting structure are deduced based on energy theory for mirror under different actuating states. Then the static deflection as a function of driven voltage, resonant frequency and transient response are analyzed with respect to the piston movement along Z-axis. The results show that the deflection can reach 2μm when 115V voltage is applied, the resonant frequency is 58.805kHz. The validity of the theory analysis in this paper is also proved through the comparison with the simulation results obtained with ANSYS.

关 键 词：微光机电系统 微镜 变形能 等效弹性系数 谐振频率 瞬态响应 

分 类 号：TN752[电子电信—电路与系统] TP212[自动化与计算机技术—检测技术与自动化装置]