基于MEMS微触觉测头和纳米测量机的特征尺寸测量  

Dimension Measurement Based on MEMS Micro Tactile Probe and Nanomeasuring Machine

作　　者：李源[1,2] 邹子英[1] 傅云霞[1] 傅星[2] 栗大超[2] 胡小唐[2] 

机构地区：[1]上海市计量测试技术研究院,上海201203 [2]天津大学精密测试技术及仪器国家重点实验室,天津300072

出　　处：《传感技术学报》2008年第12期2097-2100,共4页Chinese Journal of Sensors and Actuators

基　　金：国家质检总局科技计划资助(D00RJ0704)“纳米测量机在半导体领域的应用”

摘　　要：针对微小结构几何量测量的需求,通过集成MEMS微触觉测头和纳米测量机构建了高精度的测量系统。在验证测头性能的基础上,完成了一系列判断测头测量分辨力和精度的实验,在轴向、同向横向、异向横向三个方向测量的标准偏差分别为41.7552nm,6.05μm,6.16μm,同时,在扫描实验中进程回程扫描差值的标准偏差为23.088nm。According to dimension measurement requirement of micro structure, a measurement system combined by MEMS micro tactile probe and nanomeasuring machine is constructed. On basis of performance verification of probe＇s output, a series of tests are done. The standard deviations of measurement in same vertical , same transverse direction , and opposite transverse direction are 41. 755 2 nm , 6.05 μm , 6.16 μm separately . The standard deviation of difference between trace and retrace in scanning test is 23. 088 nm.

关 键 词：微机电系统 微触觉测头 尺寸测量 纳米测量机 

分 类 号：TB92[一般工业技术—计量学]