基于低温直接键合的血细胞计数芯片结构制备  

Fabrication of micro flow cytometers structure based on low temperature silicon wafer direct bonding

作　　者：彭平[1] 廖广兰[1] 汤自荣[1] 史铁林[1] 林晓辉[1] 刘世元[1] 

机构地区：[1]华中科技大学数字制造装备与技术国家重点实验室武汉光电国家实验室,武汉430074

出　　处：《功能材料与器件学报》2008年第6期1039-1043,共5页Journal of Functional Materials and Devices

基　　金：国家重大基础研究项目(2003CB716207);国家自然科学基金资助项目(50775091);华中科技大学研究生科技创新基金项目(HF-05-24-2007-100)

摘　　要：研究了一种新颖的微流管道血细胞计数器的结构及其工作原理,采用流体动力学对其液体分层流动特性进行了仿真分析,结合图形制备和低温直接键合工艺制作了硅基微流体管道血细胞计数器结构,并采用红外透射方法对微流体管道结构进行了检测。对封闭管道的流通性及结构的键合强度也进行了测量。研究分析表明,采用上述工艺制备的微流体芯片结构与电子器件兼容性好,具有良好的化学惰性和热稳定性,而且管道结构规则,精度高,键合界面层薄,具有较好的应用前景。The structure and principle of a novel micro flow cytometers is introduced, and then fluid delamination of the liquid in the structure is simulated. Wafer direct bonding combined with standard patterning processes are used to fabricate silicon based micro flow cytometer. The encapsulated mico -fluid channel structure is tested and investigated under the infrared microscope and scanning electron microscope. The results indicate that, a very thin interface layer and high bond quality is obtained. The bonding stress is also measured, which is strong enough for the application. The silicic micro -fluid cytometer structure is compatible with electronic device, easy to manufacture, chemical inert, and has high temperature resistance. Therefore, the fabrication process of the micro flow structure will provide a good potential for applications.

关 键 词：血细胞计数器 微流管道 低温直接键合 

分 类 号：TN454[电子电信—微电子学与固体电子学]