步进扫描投影光刻机同步机制研究  

Research on Synchronous Mechanism of Step-scan Projection Lithography

作　　者：杨亮亮 周云飞[1] 潘海鸿[2] 罗福源[1] 

机构地区：[1]华中科技大学,武汉430074 [2]广西大学,南宁530004

出　　处：《中国机械工程》2009年第1期20-23,43,共5页China Mechanical Engineering

基　　金：国家重点基础研究发展计划资助项目(2003CB716206)

摘　　要：分析了步进扫描投影光刻机的同步运动过程,将各个分系统分为同步主系统和同步从系统,采用串行同步总线实现了同步主系统的状态发布;分析了分系统与自身数据采集系统的同步通信,采用高速串行传输链路实现了分系统与远程数据采集系统的数据采集与通信;搭建了同步实验平台,对步进扫描投影光刻机的同步机制进行了验证。实验证明该平台稳定可靠,满足系统同步性能要求和工程要求。The synchronized movement process of the step and scan projection lithography was analyzed. The subsystems of the machine were divided into master synchronization subsystems and slave synchronization subsystems. The state broadcasting of master synchronization subs;stems was realized by serial synchronization bus; the communication between subsystem and its data--collection system was analyzed and the communication was realized by using high speed serial hotlink. A synchronization experimental platform was established to validate the synchronization mechanism. The experimental results show the system is stable,reliable and satisfies with the requirements of synchronization and engineering.

关 键 词：步进扫描投影光刻机 同步控制 状态同步 高速高精运动控制 

分 类 号：TN305.7[电子电信—物理电子学]