电极对PZT铁电薄膜性能的影响  

Effect of Electrodes on Properties of PZT Ferroelectric Thin Films

作　　者：王培英[1] 余大年[1] 刘梅冬[1] 曾亦可[1] 饶韫华 李楚容[1] 

机构地区：[1]华中理工大学固体电子学系

出　　处：《压电与声光》1998年第1期54-58,共5页Piezoelectrics & Acoustooptics

摘　　要：用溶胶－凝胶法制备ＰＺＴ铁电薄膜。以Ｐｔ／Ｔｉ／ＳｉＯ２／Ｓｉ为底电极，Ａｕ为上电极，形成金属－铁电薄膜－金属结构的铁电电容器。研究电极对ＰＺＴ铁电薄膜结构和电性能的影响，实验发现，金属Ｔｉ的厚度会影响ＰＺＴ铁电薄膜的结构。界面层的存在使介电系数、自发极化、矫顽电压、漏电流都与薄膜的厚度有关。PZT ferroelectric thin films were prepared by Sol Gel method. The ferroelectric capacitance with Pt/Ti/SiO 2/Si bottom electrodes and Au top electrodes have M F M structure.The effect of electrodes on the structure and electrical properties of PZT thin films was investigated. In the examples it was discovered that the thickness of metal Ti would affect the structure of PZT ferroelectric thin films. Dielectric constant polarization coercive voltage and leakage current have relations with the thickness of thin films because of the interface layer.

关 键 词：铁电薄膜 PZT铁电薄膜 界面 电滞回线 电极 

分 类 号：TM221.014[一般工业技术—材料科学与工程]