亚微米微位移工作台升降模糊控制系统  

Fine up down stage fuzzy control system with sub micrometer accuracy

作　　者：王云庆[1] 李庆祥[1] 周兆英[1] 

机构地区：[1]清华大学精密仪器与机械学系

出　　处：《清华大学学报（自然科学版）》1998年第2期47-50,共4页Journal of Tsinghua University(Science and Technology)

基　　金：国家"八五"重点科技攻关项目

摘　　要：对微位移工作台升降运动的精确控制是实现大规模集成电路中薄膜台阶高度测量自动化的关键。本文介绍了一种新型的微位移工作台升降模糊控制系统，它具有亚微米级的运动精度，保证了工作台升降快速、准确，运行平稳，对触针无冲击。在台阶高度测量中，应根据被测样品材料选择适当的测量力，该文测量力的设定是通过工作台上升或下降到相应位置来完成的。实验表明：工作台上升时间仅１０ｓ左右，测量力设定误差小于６μＮ。Accurate control of the fine stage up down motion is the key to achieve automatic measurement of the thin film step height in large scale integration (LSI). This paper introduces a new fuzzy control system of the fine stage up down motion, which possesses sub micrometer motional accuracy, makes the stage to move quickly, accurately and smoothly with no collision to stylus. Besides, in the step height measurement, the proper measuring force is chosen according to the specimen material and the setting of the measuring force is obtained by lifting/descending the stage to assigned position. Experiments show that the duration of the stage's going up is only about 10 seconds, and the set deviation of the measuring force is less than 6 μN.

关 键 词：台阶测量 工作台 模糊控制 大规模集成电路 薄膜 

分 类 号：TN470.7[电子电信—微电子学与固体电子学]