InGaAsP/InP单片集成波长解复用器件  

InGaAsP/InP monolithic wavelength demultiplexer

作　　者：赵春华[1] 朱祖华[1] 陈抗生[1] 杨易[2] 王惠民[2] 程宗权[2] 陈兴国[2] 胡雄伟[3] 

机构地区：[1]浙江大学 [2]中科院上海冶金所 [3]中科院半导体所

出　　处：《半导体光电》1998年第1期44-47,共4页Semiconductor Optoelectronics

基　　金：国家"863"资助

摘　　要：报道了基于二维凹面光栅的单片集成波长解复用器件，器件刻蚀在ＩｎＧａＡｓＰ／ＩｎＰ平板波导上，通过凹面光栅的色散作用实现不同波长光的分离，光的输入输出耦合由波导阵列来完成，器件的工作波长在１．５μｍ附近，通道间隔约４．３ｎｍ，本文给出了器件的设计方法、制作工艺和初步测试结果。An InGaAsP/InP monolithic wavelength demultiplexer based on two-dimensional concave grating is reported.The concave grating is etched on the edge of a planar waveguide and the input/output couplings of the light are performed by rib waveguides.The operation wavelength of the multiplexer are around 1.5 μm with channel spacing of 4.3 nm.The design consideration,fabrication technology and preliminary experimental results are given.

关 键 词：集成光学器件 凹面光栅 罗兰圆 波分复用 

分 类 号：TN256[电子电信—物理电子学]