微流体系统中微阀的研究现状  

Research Status of Microvalves in Microfluidic Systems

作　　者：肖丽君[1,2,3] 陈翔[1,2,3] 汪鹏[1,2,3] 李以贵[1,2,3] 陈迪[1,2,3] 

机构地区：[1]上海交通大学微纳科学技术研究院,上海200240 [2]上海交通大学微米/纳米加工技术国家级重点实验室,上海200240 [3]上海交通大学薄膜与微细技术教育部重点实验室,上海200240

出　　处：《微纳电子技术》2009年第2期91-98,共8页Micronanoelectronic Technology

基　　金：国家863高技术研究发展计划资助项目(2007AA04Z310);微米/纳米加工技术国家级重点实验室基金资助项目(9140C7903060706)

摘　　要：依据微流体系统中微阀的驱动机理,将微阀分为有源微阀和无源微阀两大类,然后对这两大类进行细分,将有源微阀分为压电、磁、静电驱动、热驱动、相变、双稳态、外部驱动等类型,将无源微阀分为悬臂梁式、薄膜式、毛细管、扭矩驱动等类型。分别讨论了各种微阀的工作原理和性能,介绍了各类微阀的实验研究进展,指出了这些微阀的特点,突出了微阀作为微流体系统的主要元件之一,起到径流调节、开/关转换、密封生物分子和微/纳粒子等作用。回顾了微阀的发展历程,分析了目前研究过程中存在的问题,提出了微阀今后的研究方向。Microvalves are divided into active microvalves and passive microvalves according to driving mechanisms of microvalves in microfluidic systems. The active valves are further classified as piezoelectric microvalves, magnetic microvalves, electrostatic microvalves, thermally actuated microvalves, phase change microvalves, bistable microvalves and microvalves using external systems. The passive microvalves are classified as cantilever beam microvalves, membrane microvalves, capillary microvalves, torque-actuated microvalves and so on. The operation principles and performances of the microvalves are discussed, and their experimental researches are introduced. The characteristics of the microvalves are pointed out and their functions are highlighted in microfluidic systems, including flow regulation, on/off switching, sealing of biomolecules, micro/nano particles and so on. The development process of microvalves is reviewed. The present problems in the microvalve research are analyzed and the research direction of microvalves in the future is proposed.

关 键 词：微流体系统 有源微阀 无源微阀 常闭型微阀 常开型微阀 

分 类 号：TH703[机械工程—仪器科学与技术] TH134[机械工程—精密仪器及机械]