用有限元法对原子力显微镜力传感器结构优化的研究  

Investigation of Structural Optimization of the Force Sensor for the Atomic Force Microscope with the Finite Element Analysis

作　　者：王晓晔[1] 薛实福[1] 李庆祥[1] 徐毓娴[1] 白立芬[1] 于水[1] 

机构地区：[1]清华大学精密仪器与机械学系

出　　处：《光学精密工程》1998年第1期36-41,共6页Optics and Precision Engineering

基　　金：国家自然科学基金

摘　　要：应用有限元法对原子力显微镜（ＡＦＭ）力传感器进行了力学分析，并计算了它的固有频率和力弹性常数。在此基础上，对力传感器基于减小应力和应力集中的原则提出了一种优化结构，并得出了可以作为力传感器设计的依据和原则。In this paper,the mechanical analysis is carried out for the force sensor in AFM with the Finite Element Analysis.The resonant frequency and force constant are also calculated.In addition,the structural optimization of the force sensor is developed.Consequently,a better structure of the cantilever with V shape based on slighter stree concentration is recommended.Some helpful principles that can be used to guide the design are presented.

关 键 词：有限元 原子力显微镜 力传感器 结构优化 

分 类 号：TN16[电子电信—物理电子学] TH742.903[机械工程—光学工程]