MEMS降阶宏模型仿真平台研究  

On the tool of MEMS CAD system-level simulation

作　　者：齐东周[1,2] 褚金奎[1,2] 关乐[1,2] 

机构地区：[1]大连理工大学精密与特种加工教育部重点实验室,辽宁大连116023 [2]辽宁省微纳米技术及系统重点实验室,辽宁大连116023

出　　处：《微计算机信息》2009年第7期185-187,共3页Control & Automation

基　　金：申请人:王立鼎褚金奎;基金项目名称:微型机械电子系统(MEMS)测试计量技术与理论研究;颁发部门:国家自然科学基金委(50535030)

摘　　要：随着MEMS系统级设计成为研究的热点,MEMS系统级CAD的开发日益重要。论文介绍了一种基于降阶宏模型MEMS系统级仿真平台,通过有限元方法提取MEMS器件几何物理数据,建立MEMS器件有限元模型,利用Krylov子空间算法缩聚自由度建立宏模型,通过系统级仿真平台对此进行系统级仿真。整个流程通过VC++编译器调用ANSYS、嵌入封装的算法动态链接库、集成SIMULINK系统仿真器完成。并用双端固支梁实例对所有模块加以验证,仿真结果准确,计算效率较高。With the development of MEMS system-level design, The system-level simulation of MEMS CAD becomes more and more important. In this paper, a simple method about MEMS system-level modeling simulation is presented, physical ＆ geometrical datas of device are extracted from finite element binary file, and the model is constructed. The Krylov subspace theory and method are applied to get reduced order model of MEMS, and then the model can be simulated by system simulation tool. The whole flow was built in VC＋＋. through the interface between ANSYS software and C＋＋ program, the reduce order arithmetic was encapsulated, and the SIMULINK was integrated. Taking a fixed-fixed beam as an example; the paper got a good simulation result and high efficiency.

关 键 词：降阶宏模型 系统级仿真 有限元 KRYLOV子空间 

分 类 号：TB391.75[一般工业技术—材料科学与工程] TP311.56[自动化与计算机技术—计算机软件与理论]