面向硅基光互连应用的无源光子集成器件研究进展  

Research Progress on Silicon Based Passive Photonic Integrated Devices Oriented for Application of On-chip Optical Interconnects

作　　者：陈少武[1] 余金中[1] 徐学俊[1] 黄庆忠[1] 余和军[1] 屠晓光[1] 李运涛[1] 

机构地区：[1]中国科学院半导体研究所集成光电子国家重点实验室.北京100083

出　　处：《材料科学与工程学报》2009年第1期153-156,149,共5页Journal of Materials Science and Engineering

基　　金：国家自然科学基金资助项目(60577044);“863计划”资助项目(2006AA032424);“973计划”资助项目(2007CB613405)

摘　　要：光互连是突破传统微电子IC性能瓶颈的重要技术手段,对推进"后摩尔时代"微电子技术的发展和高性能计算技术的实现具有关键性意义。本文在归纳总结不同层次光互连结构特点的基础上,对片上光互连(on-chip or intra-chip optical interconnects)所涉及的若干种无源光子集成器件的设计制备及性能特点进行了分析介绍,这些器件包括SOI亚波长光子线波导、SOI光子晶体波导、MMI分束/合束器、微环/微盘谐振腔滤波器、光子晶体微腔耦合滤波器、光子晶体反射镜等,是硅基片上光互连的基本构成单元。本文对这些关键性光子集成器件的国内最新研究进展进行了报道。Optical interconnects is an important measure to break through the performance ＂bottleneck＂ of the traditional microelectronics IC chips. Several important passive photonic integrated devices for on-chip optical interconnects were introduced and analyzed in terms of their design, fabrication, and characteristics. Specifically, these building blocks for optical interconnects include SOI based sub-wavelength photonic wires, photonic crystal waveguides, MMI beam splitter/ combiner, micro ring/disk resonator, photonic crystal micro cavity filter, and photonic crystal corner reflector, and their recent domestic research progresses were presented.

关 键 词：硅基光子学 片上光互连 CMOS微纳加工工艺 无源光子集成器件 光子线波导 微腔滤波器 

分 类 号：O472[理学—半导体物理] TN36[理学—物理]