背面曝光技术制作沙漏状X射线组合折射透镜  

Hourglass-shaped X-ray compound refractive lens made by back-mask exposure technology

作　　者：朱艳青[1,2] 梁静秋[1] 梁中翥[1] 黄鑫华[1,2] 乐孜纯[3] 伊福廷[4] 侯凤杰[4] 黄万霞[4] 董文[3] 王维彪[1] 王志立[4] 崔乃迪[1,2] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,长春130033 [2]中国科学院研究生院,北京100049 [3]浙江工业大学,杭州310032 [4]中国科学院高能物理研究所,北京100049

出　　处：《物理学报》2009年第3期1526-1530,共5页Acta Physica Sinica

基　　金：国家自然科学基金(批准号:60672014);北京正负电子对撞机国家实验室用户项目资助的课题~~

摘　　要：在分析沙漏状X射线组合折射透镜(X-ray compound refractive lens,XCRL)的折射聚焦理论的基础上,设计并利用背面曝光技术制作了SU-8材料的沙漏状XCRL,该技术在保证图形准确性的同时减少了工艺步骤,使制作更加简便易行.在10keV单色X射线辐射下,对制作的透镜进行了聚焦性能的实验测试,结果表明,所制作的透镜较好地实现了一维聚焦.Using back-mask exposure technology,the hourglass-shaped X-ray compound refractive lens （XCRL） was made. Firstly,the theory of the refractive focusing of the hourglass-shaped XCRL was analyzed. Then the hourglass-shaped XCRL was manufactured using back-mask exposure technology for the first time,which avoids two-time masking and reduces the transfer times of the figure. The refractive focusing performance of the lens was tested with 10？keV monochromatic X-ray. The experimental results indicated that it has good focusing performance in one dimension,which is in general coincident with the calculated results.

关 键 词：组合折射透镜 背面曝光 沙漏状 SU-8 

分 类 号：TH74[机械工程—光学工程]