三维微力探针传感器技术研究  

Research of Three-dimensional Micro-force Probe Sensor of Simulation

作　　者：王鑫垚[1] 吴伟[1] 林启敬[2] 赵玉龙[2] 

机构地区：[1]西安石油大学,陕西西安710065 [2]西安交通大学精密工程研究所,陕西西安710049

出　　处：《仪表技术与传感器》2009年第2期17-19,共3页Instrument Technique and Sensor

摘　　要：结合光纤探针与四悬臂梁支撑结构的特点,研制了一种基于微探针形式,具有μN级三维微力测量和传感能力的压阻式三维微力探针传感器。通过ANSYS数值仿真的方法研究了传感器结构之间的应力特点。并且通过实验验证了所研制的传感器的综合精度可达到0.2%FS,干扰误差≤0.3%FS.The MEMS piezoresistive sensors, which have the characteristic of high sensitivity, wide dynamic response frequency, high accuracy, miniaturization and easy integration had been extended to wide application fields. To silicon piezoresistive MEMS-based technology, with micro-fiber probe and the four characteristics of the cantilever support structure, this paper developed a micro-probe based on the form, with N-level three-dimensional micro-sensing and measurement of the capacity of the three- dimensional piezoresistive micro-probe of the sensor. By ANSYS numerical value simulated method it studied the strain characteristic between sensor structure. The micro-force probe sensor can be achieved through experiments, composite precision is 0.2% FS, interference error is less than 0.3% FS.

关 键 词：三维微力 MEMS 压阻效应 集成 探针 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]