振动作用对MEMS微结构湿汽吸附的影响(英文)  

Effects of Vibration on Moisture-Absorption of MEMS Micro-Structures

作　　者：唐洁影[1] 陈龙龙[1] 宋竞[1] 

机构地区：[1]东南大学MEMS教育部重点实验室,南京210096

出　　处：《纳米技术与精密工程》2009年第2期173-177,共5页Nanotechnology and Precision Engineering

基　　金：国家高技术研究发展计划(863)项目(2007AA04Z320);装备预研基金资助项目

摘　　要：为了提高检测微机电系统(micro-electro-mechanical systems,MEMS)结构谐振频率的准确性,笔者针对湿汽对MEMS微结构影响的问题,进行了实验设计,并分析了MEMS微结构在振动载荷下谐振频率的变化特性.结果表明,振动初期谐振频率的变化是由于MEMS微结构吸附及解吸附湿汽的作用造成的,而并非是由结构刚度的变化引起的.因此,利用谐振频率检测结构参数变化的实验中,考虑环境湿度的影响十分必要.To improve the precise measurement of resonance frequency of micro-electro-mechanical systems （MEMS） structure, an experiment was conducted to study MEMS structures influenced by moisture of the experiment environment, and the frequency variation characteristics of MEMS structures under vibration were analyzed in this paper. The results show that the changes of resonance frequency of MEMS structures during the initial period of vibration are not caused by the changes of elastic constant, but by the structure absorption and desorption of ambient moisture. As a result, it is neces- sary to consider the impact of environmental humidity on micro-structures where the resonance frequency is used to detect the changes of structural performance.

关 键 词：微机电系统 固支梁 谐振频率 湿汽 振动 

分 类 号：TP211.4[自动化与计算机技术—检测技术与自动化装置]