MEMS三维微触觉测头的低频振动测试系统  

Low Frequency Vibration Measurement System of MEMS 3D Micro Tactile Probe

作　　者：李源[1,2] 傅星[1] 谢初南[2] 沈瑶琼[2] 安兆亮[2] 栗大超[1] 胡小唐[1] 

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室,天津300072 [2]上海市计量测试技术研究院,上海201203

出　　处：《天津大学学报》2009年第3期273-277,共5页Journal of Tianjin University(Science and Technology)

基　　金：上海市博士后基金重点资助项目(07R214208)

摘　　要：针对一种MEMS三维微触觉测头,构建了基于Suss Microtec三维微定位器和PI压电陶瓷的动态测试装置,对测头的动态性能进行了表征.分别测试了测头在轴向和横向负载下对不同幅度低频振动信号的响应情况,研究了测量过程的短时重复性能.结果表明,压电陶瓷位移-电压曲线的非线性误差在轴向测量模式下小于0.102%,横向测量模式下小于0.507%.To verify the dynamic performance of an MEMS micro tactile probe, a vibration measurement system based on 3D micro positioning device of Suss Microtec and piezo of PI was constructed. Under low frequency vibration stimuli with different amplitudes, the responses of vertical and transverse directions were tested. The repeatability during short term measurement was studied. Nonlinear errors of curve of displacement of probe and output voltage are less than 0.102% and 0.507% under vertical and transverse modes respectively.

关 键 词：微触觉测头 振动测试 三维测量 微机电系统 

分 类 号：TB92[一般工业技术—计量学]