参数激励下静电驱动微机电系统动力特性研究  

DYNAMIC CHARACTERISTICS OF ELECTROSTATICALLY ACTUATED MEMS UNDER PARAMETRIC EXCITATIONS

作　　者：张文明[1] 孟光[1] 魏克湘[1] 

机构地区：[1]上海交通大学机械系统与振动国家重点实验室,上海200240

出　　处：《力学学报》2009年第2期282-288,共7页Chinese Journal of Theoretical and Applied Mechanics

基　　金：国家自然科学基金(10602033,10802029,10325209);中国博士后科学基金(20060400165)资助项目~~

摘　　要：充分考虑压膜阻尼效应的影响,提出参数激励下时变电容式静电驱动微机电系统的动力学模型,采用谐波平衡法分析在参数激励和强迫激励耦合作用下系统的幅频响应特性,探讨不同控制电压和频率比对系统幅频响应的影响,分别以交流电压幅值、频率比和压膜阻尼比为控制参数研究系统的非线性动力特性,结果表明,微尺度下静电驱动微机电系统在参数激励作用下存在较为丰富的分岔与混沌行为,压膜阻尼效应对系统动力特性的影响不可忽视.A dynamic model for the time-variable-electric-capacity-type electrostatically actuated microelectro-mechanical systems （MEMS） under parametric excitations is presented with the effect of squeeze film damping. The harmonic balance （HB） method is applied to simulate the frequency response of this system under the combined parametric and forcing excitations. The effects of the applied voltages and frequency ratios on the frequency responses of the system are discussed. In addition, the nonlinear dynamic characteristics of this system are studied with the control parameters of the amplitude of the altering current voltage, frequency ratio and squeeze film damping ratio. The theoretical results indicated the nonlinear dynamic characteristics, bifurcation and chaos of the electrostatically actuated MEMS under parametric excitations. Furthermore, it was also indicated that the effect of squeeze film damping on the dynamic characteristics of the system cannot be ignored. This investigation provides an understanding of the nonlinear dynamic characteristics of electrostatically actuated MEMS under parametric excitations at micro-scale.

关 键 词：微机电系统 静电驱动 参数激励 压膜阻尼 

分 类 号：TP202[自动化与计算机技术—检测技术与自动化装置] TH113[自动化与计算机技术—控制科学与工程]