材料的出气分析以及TiN薄膜表面改性作用  

The Analysis of the Material Outgassing and the Surface Modification of TiN Coating Film

作　　者：郑晓阳[1] 张永清[1] 赵金玉[1] 

机构地区：[1]中国科学院电子学研究所,中国科学院高功率微波源与技术重点实验室,北京100190

出　　处：《微波学报》2010年第S1期698-700,共3页Journal of Microwaves

摘　　要：为了满足微波器件对材料的真空性能越来越高的要求,本文对材料的出气原因、过程以及不同气体在材料内的扩散特点等进行了初步的分析探索,指出材料在保持原有物化特性的基础上,通过表面改性,可以提高其真空品质。最后本文利用经过表面镀TiN膜的不锈钢材料与无镀膜的相同材料,在高温烘排后放出的气体量进行对比试验,结果表明通过TiN覆膜这种表面改性工艺可以提高微波器件材料的真空性能。In order to meet microwave devices’growing demand on material’s vacuum properties,the author carries out preliminary exploration of the process of material’s outgassing and its causes,the diffusion characteristics of different gases in material.It is pointed out that on the basis of maintaining its original physical and chemical properties,material’s vacuum properties can be improved by surface modification.At last,this paper compares the volumes of the emitted gases of stainless steel coated TiN film and stainless steel without TiN film,after they are roasted by high temperature.The result confirms that the surface modification,TiN film can improve the vacuum properties of the material.

关 键 词：表面改性 出气率 反应溅射 

分 类 号：TN12[电子电信—物理电子学]