兰州重离子加速器的真空系统  

VACUUM SYSTEM OF THE LANZHOU HEAVY ION CYCLOTRON

作　　者：张恕修[1] 钟元容 吴慧敏[1] 祁文奎 林松山 李洪英 吴德忠[1] 雷菊芳[1] 

机构地区：[1]中国科学院近代物理研究所

出　　处：《真空科学与技术学报》1989年第2期87-90,共4页Chinese Journal of Vacuum Science and Technology

摘　　要：本文介绍了兰州重离子加速器主加速器的真空系统的设计与建造。一台一百立方米整体式真空室已安装就位。真空排气系统由八台φ800毫米小型氦封闭循环机械致冷机低温泵和两台大型涡轮分子泵,以及两台ZJZ-600机械增压泵组成。系统已于一九八六年九月开始运转。真空室在初次抽空中就获得了7.5×10^(-6)Pa真空度,达到了原设计要求。This Paper beseribes the vacuum System of the Lanzhou heavy ion cyclotron. A monolithic vacuum chamber with a volume of 100 m^3 has been installed in situ. The Pumping system is composed of eight RKP-800 cryopumps, two TPH 5000 turbo-molecular pumps, two ZJZ-600 Roots pumping units and a liguid nitrogen supply system. A pressure of 8.10^(-6) Pa in the vacuum chamber was obtained during the first evacuation in September of 1986.

关 键 词：真空系统 真空室 机械增压泵 真空排气 两台 涡轮分子泵 粗抽泵 油扩散泵 低温泵 漏率 

分 类 号：TB7-55[一般工业技术—真空技术]