基于MEMS微触觉测头和纳米测量机的扫描测量平台  

Scanning test platform based on MEMS micro tactile probe and nanomeasuring machine

作　　者：李源[1,2] 孙薇斌[1] 邵力[1] 傅星[2] 栗大超[2] 胡小唐[2] 

机构地区：[1]上海市计量测试技术研究院,上海201203 [2]天津大学精密测试技术及仪器国家重点实验室,天津300072

出　　处：《仪器仪表学报》2009年第3期580-585,共6页Chinese Journal of Scientific Instrument

基　　金：上海市博士后基金重点(07R214208)资助项目

摘　　要：将自主开发的基于MEMS工艺的微触觉测头与纳米坐标测量平台相结合,构建高性能的扫描测量平台,提高了微结构和器件扫描测量的精度和分辨力。基于微触觉测头的测量原理,研究了微触觉测头应用于纳米坐标测量平台的反馈控制方法以及控制转换参数的标定方法,讨论了扫描平台不同扫描方式对测量的影响。实验进行了相对平整表面和非平整表面形貌的扫描测量,结果表明,相对平整和非平整表面进程回程重复扫描差值的标准偏差分别为15.519 nm和23.088 nm,系统具有较高的测量重复性。To improve the precision and resolution in scanning measurement of micro structures and devices, the integration of nanomeasuring machine and micro MEMS tactile probe is used to construct high performance scanning test platform. The measurement principle of micro tactile probe is introduced, the probe feedback control in nanomeasuring machine is studied, and the calibration method of the control conversion parameters is also studied. Meanwhile, the influence of different scanning modes on the platform is discussed. The scanning experiments on smooth and non-smooth surfaces were carried out. Results show that the standard deviations of the scanning difference value for trace and retrace scannings on smooth and non-smooth surfaces are 15. 519 nm and 23. 088 nm respectively, and high measurement repeatability is achieved.

关 键 词：微机电系统 微触觉测头 纳米测量机 扫描测量平台 

分 类 号：TB92[一般工业技术—计量学]