基于压电陶瓷管扫描器的大范围纳米定位系统  

Nano-positioning System with Large-scale Based on PZT Scanner

作　　者：孙鑫[1] 程传东[1] 胡志强 张波[1] 

机构地区：[1]上海大学机电工程与自动化学院,上海200072 [2]上海海兹思光电科技有限公司,上海200090

出　　处：《仪表技术》2009年第4期39-41,共3页Instrumentation Technology

基　　金：上海科委资助项目(0852nm06800)

摘　　要：提出一种基于压电陶瓷管扫描器的X-Y二维大范围纳米级定位系统,该系统利用摩擦力和惯性使样品产生步进式的微位移。阐述了该系统的设计和工作原理,并给出了它在原子力显微镜中用于探针-样品间的定位控制的应用实例,取得了理想效果。A X -Y dimensions nano-positioning thesis, which utilized friction and inertia to drive the principle were introduced in detail, and an example some satisfactory results were obtained. system with large-scale based on PZT scanner was presented in this sample for micro-and nano-step movement. The design and work of its experiments in Atomic Force Microscopy was shown. And

关 键 词：样品移动平台 摩擦力和惯性 原子力显微镜 定位控制 

分 类 号：TH702[机械工程—仪器科学与技术] TH742[机械工程—精密仪器及机械]