微型光热驱动机构及其显微运动测量研究  

Novel Photothermal Microactuator and Its Microscopic Motion Measurement

作　　者：陈超[1] 张冬仙[1] 刘超[1] 章海军[1] 

机构地区：[1]浙江大学现代光学仪器国家重点实验室,杭州310027

出　　处：《中国机械工程》2009年第8期937-940,共4页China Mechanical Engineering

基　　金：国家863高技术研究发展计划资助项目(2006AA04Z237)

摘　　要：提出微型光热驱动机构（PTMA）及其显微运动测量的新方法，设计与微加工制作一种长度为1．5mm的非对称型PTMA，并开展光热驱动的实验研究。利用该测量方法，在波长为650nm、功率为9mW的半导体激光控制下，对PTMA的振幅与频率等显微运动特性进行测量和分析，测得最大振幅为10．3μm，理想响应频率范围为0～7Hz，并绘制出其运动轨迹。研究结果表明，这类新型PTMA可在激光操控下产生不同振幅（位移）、不同频率（速度）的微运动，为机电系统提供了一种新的微驱动方法。A new type of photothermal microactuator （PTMA） was developed and its microscopic motion measurement method was presented. A 1.5mm--length asymmetric PTMA was designed and micro--manufactured. Using the microscopic motion measurement method, the amplitude and frequency of the PTMA were measured and analyzed under the control of 650nm/gmW laser. The maximum amplitude was measured to be 10.3gm,while the response frequency was between 0-7Hz. The motion lotus was also plotted. The results indicate that such a PTMA is capable of generating micro-- motion with different amplitude （displacement） and different frequency （speed）, providing a novel micro--actuating method for micro electromechanical system（MEMS）.

关 键 词：微型光热驱动机构 显微运动测量 微驱动 MEMS 

分 类 号：TP391.4[自动化与计算机技术—计算机应用技术]