一种基于工艺模拟的MEMS断裂可靠度预测方法  

A Fracture Reliability Prediction Method of MEMS Based on Process Simulation

作　　者：王磊[1] 宋竞[1] 唐洁影[1] 

机构地区：[1]东南大学MEMS教育部重点实验室,江苏南京210096

出　　处：《微电子学与计算机》2009年第5期149-151,155,共4页Microelectronics & Computer

基　　金：国家"八六三"计划项目(2007AA04Z320)

摘　　要：提出了基于工艺模拟的断裂失效概率计算方法,充分考虑了非理想形貌对失效概率的影响,使得预测结果更加准确.并利用APDL语言对ANSYS进行二次封装,采用VC++开发了可靠度计算程序,使得整个计算过程简便、高效.A new fracture reliability prediction method is proposed on the basis of process simulation in this paper.The influence of non-ideal morphology on fracture failure probability is fully considered.Based on this method,a reliability prediction progrm is developed.In the program,Visual C＋＋ is used to encapsulate the APDL which is a secondary development tool provided by ANSYS.The process of reliability prediction become simple and efficient with this program.

关 键 词：MEMS 工艺模拟 可靠度 VC++ ANSYS 

分 类 号：TN406[电子电信—微电子学与固体电子学]