SiC空间反射镜材料及其表面改性技术现状分析  

Research status quo of SiC space mirror material and its surface modification

作　　者：高劲松[1] 申振峰[1] 王笑夷[1] 王彤彤[1] 陈红[1] 郑宣鸣[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所光学系统先进制造技术重点实验室,吉林长春130033

出　　处：《中国光学与应用光学》2009年第2期71-78,共8页Chinese Optics and Applied Optics Abstracts

基　　金：国家自然科学基金资助项目(No.60478035)

摘　　要：SiC材料具有良好的物理特性和机械特性,是制备大口径空间反射镜的主要候选材料之一,而SiC反射镜的制备、加工及其表面改性技术是推动高水平空间光学系统应用的重要条件。本文从实际工程应用的角度出发,分析了几种常用SiC基底反射镜材料的特性,介绍了4种SiC的制备工艺。研究了目前国内外SiC基底反射镜的应用现状及其表面改性情况,对改性层的性能指标、制备工艺和发展趋势进行了深入讨论。针对目前国内反射镜材料应用现状,认为加快高性能SiC基底材料研发工作步伐,并找到一种利用现有大口径PVD设备低温制备优质SiC改性层的方法是今后工程应用的发展方向。SiC has favorable physical and mechanical properties and it has become an important material for the large aperture substrates of space mirrors due to its excellent synthetical performance. The technologies of fabrication, manufacturing and surface modification of SiC mirrors have acted a more and more important role in the application of space optical systems. Combined with the engineering application, the characteristics of the SiC material in common use for space mirrors are analyzed and four kinds of fabricating methods are intro- duced. The current status of the application and the surface modifications of SiC mirrors at home and abroad are researched and the guide lines and the technics for the surface modification coatings are discussed in detail. According to the internal current status of engineering application, it is considered that developing high performance SiC substrate materials in a high speed and using the large aperture PVD equipment to prepare high quality SiC coatings for the surface modifications are the development direction in the future.

关 键 词：SIC SiC反射镜 表面改性 

分 类 号：TN307[电子电信—物理电子学] TN304.24