真空阴极电弧沉积法沉积类金刚石膜在扬声器振膜上应用的研究  

STUDY ON APPLICATION OF DLC FILMSDEPOSITED BY VCAD METHOD ON LOUDSPEAKER DIAPHRAGM

作　　者：谢致薇[1] 郑健红[1] 袁镇海[1] 邓其森[1] 罗广南[1] 戴达煌[1] 付志强[1] 

机构地区：[1]广州有色金属研究院

出　　处：《广东有色金属学报》1998年第1期52-56,共5页Journal of Guangdong Non-Ferrous Metals

基　　金：中国有色金属工业总公司高新技术课题

摘　　要：采用真空阴极电弧沉积技术 ,在纯钛球顶高音扬声器振膜上镀类金刚石膜 ,成为类金刚石 /钛复合振膜 .研究了钛基体的材质、厚度、振膜的几何尺寸和形状、类金刚石镀膜工艺参数对复合振膜性能的影响 .在镀膜过程中采用特殊的辅助夹具以及合理的遮挡技术 ,保证振膜不变形和最佳的类金刚石膜层厚度分布 ,使类金刚石 /钛复合振膜的频响达到 30 k Hz,并且能实现批量生产 .DLC films have been deposited on the loudspeaker diaphragm of pure Ti by means of vacuum cathodic arc deposition to produce DL C/Ti composite diaphragm.Inf- luence of the material quality and thickness of Ti substate,the appearance of diaphragm and deposition parameters of DL C films on properties of the composite diaphragm have been studied.The application of special clamping tools and proper sheltering technology during deposition can assure a non- deformable diaphragm and an optimum thickness distribution of DLC films.As a result,the frequency respondence of DLC/Ti composite diaphragm can reach30 k Hz,and the diaphragms are capable of being produced in batches.

关 键 词：VCAD 类金刚石膜 扬声器 振膜 

分 类 号：TN643[电子电信—电路与系统] TB43[一般工业技术]