MEMS二维静电驱动扫描镜设计和分析  

Design and Analysis of MEMS 2D Electrostatic Scanning Mirrors

作　　者：马文英[1] 姚军[1] 任豪[1] 王大甲[1] 

机构地区：[1]中国科学院光电技术研究所微细加工光学技术国家重点实验室,成都610209

出　　处：《微纳电子技术》2009年第5期296-300,共5页Micronanoelectronic Technology

基　　金：中科院国际创新实验室基金(CXJJ-O9-S05)

摘　　要：给出了一种静电驱动二维微扫描镜的设计和制造方案,所设计的扫描镜具有绕X轴和Y轴转动的两个自由度,并具有体积小、功耗低、频率高等优点。推导了镜面旋转角表达式并分析了吸合效应。利用POL YMUMPS工艺完成了对扫描镜的加工,并着重分析了关键工艺步骤。结合有限元分析软件,对微扫描镜的频率特性以及静态旋转特性进行了分析和研究。分析结果表明,在120V和160V的电压下,扫描镜可分别产生沿X轴方向的±5.0°和沿Y轴方向±4.4°的偏转角。优化后的扫描镜能够工作在单频率状态下,具有较高的响应速度。A new 2D electrostatic scanning mirror was designed and fabricated by micro-electro- mechanical systems （MEMS） technology. This scanner rotates on bothX- and Y-axis with a two-degree freedom, and takes advantage of smaller dimensions, lower power consumption and higher scanning frequency than conventional scanning deflection optical devices. The expressions of the mirror rotation angles were derived and the pull in effect was analyzed. The process design and the process flow of the mirror were finished by POLYMUMPS process. An analytical electrostatic model of the mirror was investigated. The finite element analysis shows that the optical scanning angles on X - and Y- axis are ＋ 5.0; and -＋ 4.4; at the voltages of 120 V and 160 V, respectively. The optimized scanner can work in single-frequency state, and has high response speed.

关 键 词：MEMS 二维扫描镜 模态 动态响应 偏转角 

分 类 号：TH703[机械工程—仪器科学与技术] TP211.6[机械工程—精密仪器及机械]