纳米级压电微动台的设计研究  

Study on piezoelectric micro-motion stage at nanometer-scale

作　　者：齐永岳[1] 林玉池[1] 张立[1] 赵美蓉[1] 

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室,天津300072

出　　处：《传感器与微系统》2009年第6期53-55,58,共4页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(50105016)

摘　　要：提出了一种新颖的"推—拉"接力运动原理,并将其应用于纳米级步距压电微动台的设计中。该原理变传统的单驱动器结构为双驱动器结构,避免了运动过程中的悬空状态,配以适当的四路驱动信号,使压电微动台能够实现连续、平稳的运动。根据使用要求设计了驱动控制系统,通过C8051F单片机产生四路驱动信号,以保证压电微动台在不同频率和电压下进行工作,并实现了整个系统的闭环控制。A novel principle of push-pull relay movement is proposed and applied in the design of the piezoelectric micro-motion stage. In structure design the traditional single actuator is updated to the double actuators in order to avoid the impending state. With the proper four-channel driving signals, the stage can move continuously and smoothly. The driving and controlling system is designed. The four-channel driving signals with different voltage and frequency are generated by C8051F MCU. In addition the close-loop position is realized.

关 键 词：尺蠖运动 压电马达 微驱动 微定位 

分 类 号：TM282[一般工业技术—材料科学与工程]