GCr15表面钽沉积及碳离子注入的摩擦性能的研究  

Anti wear property of GCr15 steel deposited with Ta film and implanted with C ions

作　　者：李忠文[1] 唐光泽[1] 马欣新[1] 孙明仁[1] 

机构地区：[1]哈尔滨工业大学材料学院,哈尔滨150001

出　　处：《核技术》2009年第6期423-426,共4页Nuclear Techniques

基　　金：教育部新世纪人才项目;973项目(2007CB607602)资助

摘　　要：GCr15钢广泛用于各类轴承制造。为提高其摩擦性能，用磁控溅射法在GCr15轴承钢试样表面沉积厚约100nm的钽膜，再进行不同注量的50keV碳离子注入。用Ф6的GCr15钢球做对磨试验，测试它们的摩擦性能，用SEM观察磨痕形貌。结果表明，处理后GCr15钢改性层的Ta2C含量随注量增加，摩擦性能得以提高。载荷1N、滑动速度50mm/s条件下，注入3×10^17ions／cm^2的试样耐磨性是原始试样的1．65倍；表面沉积钽膜后，摩擦系数由未处理前的0．8～1下降至0．5左右，钽膜注碳后摩擦系数更降至0．2～0．3，注入层主要以磨粒磨损为主。Tantalum films of 100-nm thickness were deposited on GCr15 bearing steel by magnetron sputtering. The films were implanted to different doses of 50 keV carbon ions by plasma-based ion implantation. Wear resistance test were performed on ball-disk friction tester with Ф6 mm GCr15 steel balls. X-ray diffraction patterns showed that the modified layers contained Ta2C, and TaC appeared at increased doses. Wear property of the modified GCr15 steel was improved, according to scanning electron microscopy images of the wear trace and abrasive debris. Under 1N load and 50 mm/s sliding speed, in comparison with the control, anti wear property of the sample deposited with Ta film and implanted with 3×10617/cm^2 carbonions increased by a factor of 1.65, and the friction coefficient decreased from 0.8-1 to 0.5 after Ta film deposition, and decreased further to 0.2-0.3 after the carbon ion implantation. It was found that the main wear mechanism is abrasive wear.

关 键 词：磁控溅射沉积 碳离子注入 摩擦系数 磨粒磨损 

分 类 号：TG174.444[金属学及工艺—金属表面处理] TH117.1[金属学及工艺—金属学]