超精密运动台激光测量模型及误差补偿算法  

An Algorithm on Laser Measurement Model of Ultra-precision Motion Stage and Error Compensation

作　　者：滕伟[1] 周云飞[1] 穆海华[1] 杨亮亮 

机构地区：[1]华中科技大学国家数控系统工程技术研究中心,武汉430074

出　　处：《中国机械工程》2009年第12期1492-1497,共6页China Mechanical Engineering

基　　金：国家自然科学基金资助项目(50775088)

摘　　要：分析激光测量中阿贝误差与余弦误差产生的原因,分两种情况讨论阿贝误差与余弦误差对测量光程的影响:一是忽略激光干涉仪加工误差与安装误差的理想模型;二是考虑干涉仪加工误差与安装误差的非理想模型。计算两种情况下测量光束的光程长度,建立x、y方向直线测量位置不受运动台倾斜或旋转影响的测量模型,进而推导出运动台五自由度激光测量算法。实例证明该算法能有效地进行阿贝误差与余弦误差补偿,满足超精密运动的要求。该算法已成功应用于半导体加工设备中。The reasons of Abbe error and cosine error were analyzed in laser measurement. Then the effect of Abbe error and cosine error on measurement optical path was discussed as two instances： an ideal model of interferometer without rotation ＆ tilt and a non--ideal model of interferometer with them. The optical path was calculated separately. Next, a model whose x-y translation value will not be affected by the tilt ＆ rotation of motion stage and a 5--DOF laser measurement algorithm were concluded. Finally, experimental results demonstrate the effectiveness and reliability of the proposed algorithm. The presented algorithm has been applied in semiconductor manufacturing equipment successfully.

关 键 词：激光测量 阿贝误差 余弦误差 误差补偿 

分 类 号：TP391[自动化与计算机技术—计算机应用技术]