一种新型无源MEMS万向碰撞开关  

Novel Passive MEMS Universal Crash Switch

作　　者：吝海锋[1] 何洪涛[1] 卞玉民[1] 杨拥军[1] 

机构地区：[1]中国电子科技集团公司第十三研究所,石家庄050051

出　　处：《微纳电子技术》2009年第6期358-361,共4页Micronanoelectronic Technology

基　　金：国家高技术研究发展(863)专项经费资助项目(2007AA04Z355)

摘　　要：采用MEMS体Si加工工艺和圆片级封装技术,开发了一种基于特种运输中的新型无源MEMS万向碰撞开关。开关选用弹簧-质量-阻尼的典型碰撞结构,对惯性加速度计敏感,以碰撞接触的形式提供导通电阻信号,并拥有500g径向360°和1000g纵向碰撞触发,单个器件可以实现多个器件的功能。经过仿真设计和工艺研究,最终完成了开关的制作,封装后体积后为6.6mm×5mm×2.4mm。经测试表明开关实现了初始的设计阈值,导通电阻约10Ω,导通时间约10μs,验证了抗5000g冲击能力,它具有体积小、重量轻、高可靠、低成本,可反复使用等特点,在可靠性跌落试验、汽车安全碰撞试验和飞行器上具有广泛的应用前景。A novel passive MEMS universal crash switch for the special-type transport was developed. The switch was fabricated using the bulk micromaehining process and packaged in wafer level. The structure is the classical spring-quality-damp. The switch, which has multiple functions and can he repeatedly used, puts out the signal with 500 g 360° in radial direction and 1 000 g in longitudinal direction. By simulating and researching the process, the switch was finally developed. The bulk is 6.6 mm× 5 mm ×2.4 mm in size after packaged. The test results show that designed threshold value is achieved, on-state resistance is about 10Ω, and onstate time is 10 μs. It is also approved that the switch can endure 5 000 g impact. The switch has the advantages of small size, light weight, good reliability, low price and repeat using. It can be wildly used in the vehicle crash test, drop test on reliability and aircrafts.

关 键 词：碰撞开关 微电子机械系统 特种运输 无源 万向 

分 类 号：TH703[机械工程—仪器科学与技术]