毫米波硅基微机械屏蔽膜微带线和滤波器  

Millimeter-wave Silicon Micromachined Shielded Membrane Microstrip Line and Filter

作　　者：戴新峰[1,2] 郁元卫[1,2] 贾世星[1] 朱健[1,2] 於晓峰[1] 丁玉宁[1] 

机构地区：[1]南京电子器件研究所,南京210016 [2]单片集成电路与模块国家级重点实验室,南京210016

出　　处：《固体电子学研究与进展》2009年第2期202-205,275,共5页Research & Progress of SSE

摘　　要：介绍了一种屏蔽膜微带线,该型传输线为介质薄膜所支撑,周围为空气,并为金属面所屏蔽,具有可忽略不计的衬底损耗及色散效应,以及很小的辐射损耗。运用HFSS三维电磁场仿真软件对毫米波屏蔽膜微带线与滤波器进行了仿真设计,运用MEMS工艺在两层高阻硅衬底上进行了样品的研制。样品取得了良好的测试结果,其中屏蔽膜微带线插入损耗小于0.1dB/mm。In this paper, the shielded membrane mierostrip （SMM） is presented. This type of transmission line is supported by a thin dielectric membrane in an air-filled environment, and is shielded by a metallic lid. It possesses very low radiation loss as well as negligible substrate loss and dispersion effects. Millimeter-wave SMM transmission-lines and filters are designed by HFSS 3D electro-magnetic field simulation software, and then fabricated by silicon MEMS processing. The measured results of the prototypes show good performance, especially the SMM transmission fines shows very low insertion loss less than 0. 1 dB/mm in millimeter-wave band.

关 键 词：毫米波 硅基微机械 屏蔽膜微带线 滤波器 

分 类 号：TN713.8[电子电信—电路与系统] TN811.7