纤毛式MEMS矢量水声传感器的仿生组装  

Bionic Encapsulation of a Hair Cell Vector Hydrophone Based on MEMS

作　　者：张国军[1] 陈尚[1] 薛晨阳[1] 张斌珍[1] 张开瑞[1] 

机构地区：[1]中北大学电子测试技术国家重点实验室,太原030051

出　　处：《纳米技术与精密工程》2009年第3期221-227,共7页Nanotechnology and Precision Engineering

基　　金：国家自然科学基金资助项目(50535030)

摘　　要：提出了一种纤毛式微机电系统(MEMS)矢量水声传感器的仿生组装技术.期望结合MEMS工艺和仿生组装工艺技术,解决复杂结构的仿生制造问题.文中简单介绍了仿生学理论以及定向探测机理.采用MEMS基硅微机械加工技术完成了传感器微结构的加工.通过模仿鱼类侧线器官神经丘感觉器的仿生结构,完成了传感器仿生微结构的组装,制作出纤毛式硅微仿生矢量水声传感器的模型样机.最后,完成了传感器的校准测试.测试结果表明,该水声传感器不但体积小、质量轻、结构简单,而且具有"8"字型的指向特性.该水声传感器的声压灵敏度为-197.7 dB(0 dB=1 V/μPa).A hair cell vector hydrophone based on micro electro mechanical system （MEMS） was presented in this paper. It is desirable that the application of MEMS technology and bionic assembly processing may effectively solve the bionic manufacture problem of complex structure. The bionic principle and detection theory were generally introduced in this paper. Microfabrication technology based on MEMS was employed for the fabrication of the microstructure. By means of the simulation of fish＇s neuromast organ, the encapsulation of the bionic microStructure was accomplished and the prototype of the vector hydrophone was fabricated. In order to verify the function of the sensor, preliminary characterization tests of the hydrophone were performed. Results show that the hair cell hydrophone not only possesses satisfactory directional pattern but also has miniature size and lightweight quality as well as simple structure. The free-field voltage sensitivity of the hydrophone is -197.7 dB （0 dB = 1 V/μPa）.

关 键 词：微机电系统 仿生组装 纤毛 矢量水声传感器 

分 类 号：TB565.1[交通运输工程—水声工程]