浮动电极型单向声表面波驱动器的设计与制造(英文)  

Design and fabrication of floating electrode unidirectional SAW actuator

作　　者：张俊峰[1] 李以贵[1] 惠春[2] 

机构地区：[1]上海交通大学微纳米科学技术研究院薄膜与微细加工技术教育部重点实验室微米纳米加工技术国家级重点实验室,上海200240 [2]上海交通大学生命科学技术研究院,上海200240

出　　处：《光学精密工程》2009年第6期1300-1305,共6页Optics and Precision Engineering

基　　金：Supported by the National Natural Science Foundation of China (Grant No .60777016)

摘　　要：考虑声表面波驱动器直接驱动工作物体,能量损失小,传动误差小,且尺寸小,噪声低,抗电磁干扰等特点,基于MEMS技术并采用在Li NbO3基底上加工微型电极的方式制作了一种声表面波微驱动器。为了更加有效地控制驱动方向,提出了一种新型叉指结构,即浮动电极型单向换能器,然后利用ANSYS软件,对声表面波换能器进行了优化设计和分析,制作出了孔径尺寸为5mm,电极厚度为0.8μm,指宽为6.7μm,周期为80μm的浮动电极型单向换能器。该声表面波驱动器比以往的驱动器具有更高的谐振频率(接近50MHz)和更有效的方向可控性,从而有助于微光学控制系统的进一步微型化和可控化。Surface Acoustic Wave（SAW ） actuators have been dramatically required for a micro actuator not only due to their direct driving objects, low energy losses and drive errors, but also their higher work frequencies, shorter SAW waves, small dimensions, and low noises. In this paper,an applicable （SAW） micro actuator is implemented by fabricating microelectrodes on a LiNbO3 substrate and by using MEMS technologies. In order to control the drive direction more effectively, a new type of IDT, Floating Electrode Unidirectional Transducer （FEUDT） is developed and the optimal designs are proposed and compared with others by ANSYS. The dimensions of the FEUDT are 5 mm in the aperture size, 80μm in the pitch, 6.7 μm in the strip width,and 0. 8 μm in the thickness. In comparison with other types of SAW actuators, the floating electrode unidirectional SAW actuator has a higher frequency vibration near to 50 MHz and more effectively controllable drive direction ability,which will be very useful for micro optical controlling systems in microminiaturization and controllability.

关 键 词：声表面波驱动器 微机电系统 浮动电极型单向换能器 

分 类 号：TB51[理学—物理] TM384[理学—声学]