膜厚对GdTbFeCo非晶薄膜磁光性能的影响  

Effect of Thickness on Magneto-optical Properties of GdTbFeCo Thin Films

作　　者：朱宏生[1] 冯小源[1] 朱洪杰[1] 林玉[1] 郭继花[1] 黄致新[1] 

机构地区：[1]华中师范大学物理科学与技术学院,湖北武汉430079

出　　处：《信息记录材料》2009年第3期42-44,共3页Information Recording Materials

基　　金：国家大学生创新性实验计划项目资助

摘　　要：采用射频磁控溅射法在玻璃基片上制备了GdTbFeCo非晶薄膜,通过调节溅射时间制备出了不同厚度的薄膜,并研究了膜厚对薄膜磁光性能的影响。磁光特性测试仪的测试结果表明:溅射功率为75W,溅射气压为0.5Pa,薄膜厚度为120nm时,可以使GdTbFeCo薄膜垂直方向矫顽力和克尔角达到较大值,分别高达4575.476Oe和0.393o。能满足磁光记录材料矫顽力大,磁光克尔角大的要求。GdTbFeCo magnetic thin films were prepared onto glass substrates by RF magnetron sputtering system. The effect of thickness on the magneto-optical properties of the thin films was investigated. Magnetic-optical characteristic measurement showed that when the sputtering power, sputtering pressure and thickness of the GdTbFeCo thin films are 75W, 0. 5Pa and 120nm,respectively,the kerr rotation angle and coercivity that in the perpendicular direction are as high as 0. 393° and 4575. 476Oe, respectively. These can satisfy the request of magneto-optical recording media about high coercivity and big kerr rotation.

关 键 词：薄膜 磁光记录 克尔角 矫顽力 

分 类 号：O484.4[理学—固体物理]