微悬臂梁阵列成像系统光学特性分析  

The performance analysis of optical readout in micro-cantilever array IR imaging system

作　　者：严伟[1] 佟军民[2] 陈大鹏[3] 胡松[1] 赵立新[1] 杨勇[1] 蒋文波[1] 周绍林[1] 陈旺富[1] 

机构地区：[1]中国科学院光电技术研究所,成都610209 [2]许昌职业技术学院,许昌461000 [3]中国科学院微电子研究所微细加工与纳米技术研究室,北京100029

出　　处：《四川大学学报（自然科学版）》2009年第4期988-992,共5页Journal of Sichuan University(Natural Science Edition)

基　　金：西部之光人才培养计划支持(A07K005);2008科技救灾项目

摘　　要：光学读出式红外成像系统是近年来提出的一种新型红外成像技术,该技术是基于探测双材料微悬臂梁吸收红外辐射后的变形量.这种红外光学成像系统由微悬臂梁阵列和光学读出设备组成,在本文中,将首先论述其系统结构和成像原理;在此基础上,通过分析单个微梁的衍射谱在透镜谱面上空域分布特点,提出了一种改进的谱平面刀口滤波方法,特别是讨论了成像系统将热变形角度转换成图像灰度的原理以及影响因素,并深入分析了成像系统的灵敏度.最后,给出了利用本系统获得37℃和300℃温度的红外发光物体成像结果.Optical readout uncooled infrared imaging , which is based on detecting the thermal deformation of the micro bimaterial cantilever array caused by absorbing the IR radiation, is a novel technique presented recently. In this paper, The IR imaging system consisting of micro-cantilever array and optical -readout device is presented. In this paper, the imaging principle and the structure of the imaging system is introduced firstly. Then, the knife edge filtering operation in spectrum plane is discussed, especially the theory that imaging system translates the incline angle of micro cantilever array to the intensity in image plane is discussed. The sensitivity of the system and influence factors is analyzed. Finally, A thermal image of about 30 ℃ and 300 ℃ object is obtained by the presented system.

关 键 词：非制冷红外成像 光学读出 双材料微梁阵列 

分 类 号：TN216[电子电信—物理电子学]