用傅里叶变换方法实现的纳米多层膜性能表征  

Applications of the Fourier Transform to Characterize the Performances of Nanometer Multilayer Structures

作　　者：蒋晖[1] 徐敬[1] 朱京涛[1] 黄秋实[1] 白亮[1] 王晓强[1] 王占山[1] 陈玲燕[1] 

机构地区：[1]同济大学物理系,精密光学工程技术研究所,上海200092

出　　处：《中国激光》2009年第8期2158-2165,共8页Chinese Journal of Lasers

基　　金：国家自然科学基金(10435050,1067091,10675092);国家863计划(2006AA12Z139);上海市科学技术委员会基金(07DZ22302)资助课题

摘　　要：利用傅里叶变换(FFT)分析了纳米多层膜的X射线掠入射反射率测试曲线,模拟了各种制备和测试条件对多层膜结构参数测试结果的影响,检验了傅里叶变换方法的适用性和精确度。分析结果表明,相对于传统的反射曲线拟合方法,傅里叶变换方法具有直观和快速的优点,在不引入主观的膜层结构模型的情况下可以较为准确地定出复杂的多层膜结构参数,为多层膜结构表征提供了一种分析方法。Fourier transform is used to analyze the grazing incidence X-ray reflectivity curve of nanometer multilayer structures. The influences of preparing and measuring conditions on measuring results of multilayer structure parameters are simulated and the applicability and accuracy of Fourier transform is verified. The results show that the Fourier transform is more intelligible and quicker than traditional curve fitting method. The Fourier transform can exactly determine complex multilayer structure parameters without any subjective layer-structure model, which is a powerful analysis method for characterization of multilayer structures.

关 键 词：薄膜 纳米多层膜 傅里叶变换 自相关函数 曲线拟合 界面 

分 类 号：O484.5[理学—固体物理]