高性能电磁式微机械振动环陀螺  

High performance electromagnetic micro-machined ring vibration gyroscope

作　　者：陈李[1] 陈德勇[1] 王军波[1] 毋正伟[1] 张明[1] 

机构地区：[1]中国科学院电子学研究所传感技术国家重点实验室,北京100190

出　　处：《光学精密工程》2009年第8期1915-1921,共7页Optics and Precision Engineering

基　　金：国家863高技术研究发展计划资助项目(No.2007AA04Z318);国家自然科学基金资助项目(No.60674112;60772018)

摘　　要：为改进振动环陀螺的模态匹配并提高其品质因数,设计了一种采用全对称结构实现模态匹配的电磁式微机械振动环陀螺。通过理论推导,建立了陀螺灵敏度和机械噪声的数学模型,分析了陀螺参数对灵敏度及分辨力的影响。采用(100)晶向的单晶硅及工艺简单,无需键合的MEMS体硅标准工艺加工了陀螺样片。器件频率响应实验结果表明,所设计的振动环陀螺驱动模态和检测模态频率之差<0.5Hz,大气压下品质因数约为500,在1Pa的低真空下可达14000。锁相放大器测试结果表明,在-200～200°/s,陀螺分辨力为0.05°/s,灵敏度为0.2μV/(°/s)。测试结果表明该陀螺能够实现模态匹配和较高的品质因数,具有较高的性能指标。To realize mode matching and high quality factors （Q） and to improve the performance of micro machined ring vibration gyroscopes, a novel electromagnetic ring vibration gyroscope was designed and fabricated by using a centrosymmetric and enantiomorphous structure consisting of a ring and eight symmetric support springs to match the resonant frequencies of a drive mode and a sense mode. The theoretical models for the sensitivity and the mechanical noises of the gyroscope were deduced, and the effects of gyroscope parameters on the sensitivity and resolution were analyzed. Through the standard bulk MEMS processes, the gyroscope samples were fabricated with （100） silicon, Experiments show that all the processes are easy to realize, for they have no bonding operation. Moreover,a frequency response experiment indicates that the frequency split between the drive mode and the sense mode is less than 0.5 Hz, and the quality factor is about 500 in atmosphere and 14 000 in vacuum with 1 Pa. Phase Locked Amplifier（PLA） tests show that the resolution of the gyroscope is 0.05 °/s and the sensitivity is 0, 2 uV/（°/s） over the ranges of --200 -200 °/s.

关 键 词：电磁式陀螺 微机械陀螺 振动环 

分 类 号：V241.5[航空宇航科学与技术—飞行器设计] TP212.12[自动化与计算机技术—检测技术与自动化装置]